| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal indium antimony waveguide in which the difference in refractive indices with respect to a region having a smaller refractive index is large and efficiency reduction due to the attenuation of electromagnetic wave is small. SOLUTION: The waveguide has a structure in which a core region 5 through which the electromagnetic wave passes and a clad region 4 through which the electromagnetic wave does not pass are provided on the single crystal indium antimony thin film 2 provided on a semiconductor substrate 1. The clad region 4 has a photonic crystal structure in which circular columns 3 made of a material having low dielectric constant are disposed with a predetermined period a. The diameter b of the columns 3 made of the material having low dielectric constant may be sufficiently smaller than the period a. In the core region 5, the circular columns 3 do not exist in the single crystal indium antimony thin film 2 having the large refractive index and small absorption of the electromagnetic wave. COPYRIGHT: (C)2010,JPO&INPIT |
