| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of shortening takt time more certainly. SOLUTION: A coating apparatus has a substrate conveyance part that conveys a substrate, and a plurality of coating parts that coat fluid substance on the substrate while conveying the substrate by the substrate conveyance part. The substrate conveyance part has a substrate carry-in region for carrying in the substrate to one end in a substrate conveyance direction, and a substrate carry-out region for carrying out the substrate to the other end in the substrate conveyance direction. The coating parts are arranged between the substrate carry-in region and the substrate carry-out region so that at least a distance between adjacent two coating parts is larger than the size of the substrate in the substrate conveyance direction. COPYRIGHT: (C)2010,JPO&INPIT
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