INSPECTION SYSTEM, INSPECTION METHOD OF INSPECTION SYSTEM, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To automate information extraction of an inspection system; to reduce operation man-hours; and to improve reliability. SOLUTION: In this inspection system equipped with a device to be inspected having two or more inspection objects to be inspected, and an inspection device for determining an abnormality of a detection result of the inspection objects by a sensor, the inspection objects and a parameter which is a threshold for determining a detection result to be abnormal are changed to be correlated. COPYRIGHT: (C)2010,JPO&INPIT