发明名称 SUPERCONDUCTING STRUCTURE, APPARATUS FOR PROCESSING SUPERCONDUCTING STRUCTURE, AND METHOD FOR PROCESSING SUPERCONDUCTING STRUCTURE
摘要 A superconducting structure includes an NbN thin-film as a first superconducting thin-film layer on the upper surface of a substrate, an NbN thin-film as a second superconducting thin-film layer above the NbN thin-film, and a MgO thin-film as a protective thin-film provided between the NbN thin-film and the NbN thin-film.
申请公布号 US2010093548(A1) 申请公布日期 2010.04.15
申请号 US20090631777 申请日期 2009.12.04
申请人 KAWAKAMI AKIRA 发明人 KAWAKAMI AKIRA
分类号 H01L39/24 主分类号 H01L39/24
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