发明名称 Exposure Mask for Forming Photodiode and Method of Manufacturing Image Sensor Using the Same
摘要 An exposure mask for forming a photodiode of an image sensor and a method of manufacturing an image sensor using the exposure mask may be disclosed. An exposure mask for forming a photodiode of an image sensor includes a plurality of main open patterns, each having a first open pattern that is rectangular and a second open pattern extending outward from at least one corner of the first open pattern, and an open serif extending outward from each of the corners of the second open pattern that do not overlap with the first open pattern, covering a predetermined area adjacent to the second open pattern.
申请公布号 US2010092875(A1) 申请公布日期 2010.04.15
申请号 US20090562691 申请日期 2009.09.18
申请人 CHO WOO JIN 发明人 CHO WOO JIN
分类号 G03F1/00;G03F7/20 主分类号 G03F1/00
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