| 摘要 |
PROBLEM TO BE SOLVED: To provide a work moving table and a droplet discharge device having the same, capable of eliminating gas harmonic influence of floating gas on a work. SOLUTION: This work moving table has a gas floating means incorporated into a table base 22 and floating the work W on the table base 22 by gas, a working gas supply means for supplying working gas for floating to the gas floating means, a moving means for moving the work W floated by the gas in the horizontal plane, and a gas harmonizing means interposed in a gas supply flow passage between the gas floating means and the working gas supply means and adjusting the temperature of the working gas by a temperature adjusting means. COPYRIGHT: (C)2010,JPO&INPIT |
