THE SENSING DEVICE

摘要

PURPOSE: An element for detecting a specific functional group in fluid is provided to widen surface are of a conductive cubic structure and to maximize voltage variation. CONSTITUTION: A detection element comprises a detection capacitor which contains a first and second electrodes and having the first electrode at the lower portion of reaction layer; and an electric field effect transistor containing a gate electrode(240). The second electrode is conductively connected to a source electrode of the electric field effect transistor and is formed with a higher conductive material than the electric field transistor substrate(200). The electric field transistor comprises a source/drain electrode(220), gate insulating layer(230), and gate electrode.