| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration eliminating device capable of supporting an inertial body which generates reaction force for eliminating vibration in an object, without supplying a fluid. SOLUTION: The vibration eliminating device 10 includes: a device body 20 including the inertial body and an actuator mechanism for driving the inertial body; and a control section 12, which detects accelerationαin the X direction of a surface plate 8 not expressed in a figure and which controls the device body 20 to generate reaction force of the inertial body to cancel the accelerationα. The device body 20 includes: a casing 22; the inertial body 24 supported inside the casing 22 by a support spring 26, of which rigidity against the movement in the axial direction is smaller than the rigidity against the movement in the radial direction; holding springs 50 and 52 for holding the inertial body 24 in the axial direction relative to the casing 22; the actuator mechanism 30 for driving the inertial body 24 to move in the X direction; and a speed sensor 40. COPYRIGHT: (C)2010,JPO&INPIT |
