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发明名称
摘要
申请公布号
JP4449916(B2)
申请公布日期
2010.04.14
申请号
JP20060034955
申请日期
2006.02.13
申请人
发明人
分类号
H01L21/336;H01L21/288;H01L21/3205;H01L29/786;H01L51/05;H01L51/40
主分类号
H01L21/336
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