MICRO RESONATOR USING POLYCRYSTALLINE 3C-SIC AND ITS FABRICATING METHOD

摘要

PURPOSE: A resonator using polycrystalline 3 Cubic-Silicon Carbide and a manufacturing method thereof are provided to use the resonator as a wireless telecommunication component, a biosensor, and a chemical sensor. CONSTITUTION: A manufacturing method of a resonator using polycrystalline 3C-SiC is as follows. An oxide film(120) is formed on a substrate(110). A part of the oxide film located in the bottom of the resonator is etched. An air gap is formed by etching a part of the substrate. A 3C-SiC thin film is formed using a chemical vapor deposition method. Hexamethyldisilane is used as a precursor of the 3C-SiC thin film.