发明名称 |
POROUS SILICA PRECURSOR COMPOSITION AND METHOD FOR PREPARING THE SAME, POROUS SILICA FILM AND METHOD FOR FORMING THE SAME, SEMICONDUCTOR DEVICE, IMAGE DISPLAY DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE |
摘要 |
Disclosed is a porous silica precursor composition containing an organic silane represented by the following chemical formula 1: R(R-O)Si (wherein Rand Rmay be the same or different and each represents an alkyl group, and m represents an integer of 0-3), water, an alcohol and a quaternary ammonium compound represented by the following chemical formula 2: RN(R)X (wherein Rand Rmay be the same or different and each represents an alkyl group, and X represents a halogen atom). This porous silica precursor composition is prepared by mixing such components. A porous silica film is formed by coating and firing the porous silica precursor composition. Also disclosed are a semiconductor device having a porous silica film, an image display device, and a liquid crystal display device. |
申请公布号 |
KR20100038423(A) |
申请公布日期 |
2010.04.14 |
申请号 |
KR20107002372 |
申请日期 |
2008.08.05 |
申请人 |
ULVAC, INC. |
发明人 |
NAKAYAMA TAKAHIRO;NOZUE TATSUHIRO;MURAKAMI HIROHIKO |
分类号 |
C01B33/12;C09D1/00;G02F1/1337;H01L21/768 |
主分类号 |
C01B33/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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