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发明名称
PHOTORESIST COATING LIQUID SUPPLYING APPARATUS, AND PHOTORESIST COATING LIQUID SUPPLYING METHOD AND PHOTORESIST COATING APPARATUS USING SUCH PHOTORESIST COATING LIQUID SUPPLYING APPARATUS
摘要
申请公布号
EP1830393(A4)
申请公布日期
2010.04.14
申请号
EP20050809597
申请日期
2005.11.25
申请人
AZ ELECTRONIC MATERIALS USA CORP.
发明人
TANIGUCHI, KATSUTO;KOJIMA, KAZUHIRO;NOYA, ATSUKO
分类号
H01L21/027;B05C5/02;B05C11/10;B05D3/00;G03F7/16
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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