发明名称 DISPLAY PANEL EXPOSURE DEVICE, EXPOSURE METHOD AND ASSEMBLING OR ADJUSTING METHOD OF DISPLAY PANEL EXPOSURE DEVICE
摘要 PURPOSE: A display panel exposure device is provided to reinforce connection intensity of the assembly of a stage, to be easily assembled, and to easily control an assembled part from a partitioned state after assembly. CONSTITUTION: A display panel exposure device bakes the patterns of a plurality of tables(10,12) for returning a substrate and a mask plate on the surface of the substrate at an exposure position after returning. At least one table of a plurality of tables is a connecting table(11). The connecting table has a polygonal column and connection planes contacting different two tables. A hole larger than a diameter of a sheet plane is formed on the sheet plane for tightening screw or screwnut and the plane facing the sheet plane.
申请公布号 KR20100038153(A) 申请公布日期 2010.04.13
申请号 KR20090093651 申请日期 2009.10.01
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION 发明人 MAKI NOBUYUKI;WATANABE NARUO;MATSUYAMA KATSUAKI
分类号 G03F7/20;H01L21/68 主分类号 G03F7/20
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