发明名称 |
DISPLAY PANEL EXPOSURE DEVICE, EXPOSURE METHOD AND ASSEMBLING OR ADJUSTING METHOD OF DISPLAY PANEL EXPOSURE DEVICE |
摘要 |
PURPOSE: A display panel exposure device is provided to reinforce connection intensity of the assembly of a stage, to be easily assembled, and to easily control an assembled part from a partitioned state after assembly. CONSTITUTION: A display panel exposure device bakes the patterns of a plurality of tables(10,12) for returning a substrate and a mask plate on the surface of the substrate at an exposure position after returning. At least one table of a plurality of tables is a connecting table(11). The connecting table has a polygonal column and connection planes contacting different two tables. A hole larger than a diameter of a sheet plane is formed on the sheet plane for tightening screw or screwnut and the plane facing the sheet plane. |
申请公布号 |
KR20100038153(A) |
申请公布日期 |
2010.04.13 |
申请号 |
KR20090093651 |
申请日期 |
2009.10.01 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MAKI NOBUYUKI;WATANABE NARUO;MATSUYAMA KATSUAKI |
分类号 |
G03F7/20;H01L21/68 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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