发明名称 |
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same |
摘要 |
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
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申请公布号 |
US7695231(B2) |
申请公布日期 |
2010.04.13 |
申请号 |
US20050076512 |
申请日期 |
2005.03.08 |
申请人 |
JUSUNG ENGINEERING CO., LTD. |
发明人 |
KIM HONG-SEUB;PARK HYUN-SOO;JUNG SOON-BIN;CHA SUNG-HO;KIM DONG-JIN;HWANG WOOK-JUNG;YOO JIN-HYUK |
分类号 |
B65G49/00;B65G1/00;C23C16/00;F04D17/10;G02F1/133;H01L21/00 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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