发明名称 Sidewall semiconductor transistors
摘要 A novel transistor structure and method for fabricating the same. First, a substrate, a semiconductor region, a gate dielectric region, and a gate block are provided. The semiconductor region, the gate dielectric region, and the gate block are on the substrate. The gate dielectric region is sandwiched between the semiconductor region and the gate block. The semiconductor region is electrically insulated from the gate block by the gate dielectric region. The semiconductor region and the gate dielectric region share an interface surface which is essentially perpendicular to a top surface of the substrate. The semiconductor region and the gate dielectric region do not share any interface surface that is essentially parallel to a top surface of the substrate. Next, a gate region is formed from the gate block. Then, first and second source/drain regions are formed in the semiconductor region.
申请公布号 US7696025(B2) 申请公布日期 2010.04.13
申请号 US20070867840 申请日期 2007.10.05
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU HUILONG;CLEVENGER LAWRENCE A.;DOKUMACI OMER H.;KUMAR KAUSHIK A.;RADENS CARL J.;CHIDAMBARRAO DURESETI
分类号 H01L21/00;H01L21/84 主分类号 H01L21/00
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