发明名称 GAS PREHEATER
摘要 A gas preheater for a CVI furnace designed for the densification of annular porous substrates (32)arranged in a plurality of vertical annular stacks of substrates, comprising: a sleeve (52) made of heat conductive material resting upon the bottom wall (14) of a susceptor (12,14) and delimiting a gas preheating chamber, with a gas inlet (56) opening in the gas preheating chamber; a heat exchange assembly (50) located in the gas preheating chamber; a gas distribution plate (60) resting upon the sleeve, covering the gas preheating chamber and provided with a plurality of passages (60a,60b) for preheated gas; a load supporting plate for supporting stacks of annular substrates and provided with a plurality of passages in communication with respective passages of the gas distribution plate and registration with internal volumes of respective stacks of annular substrates; and nozzles (62) inserted in passages communicating the gas preheating zone with the internal volumes of respective stacks of annular substrates for adjusting the flows of preheated gas respectively admitted in said internal volumes.
申请公布号 CA2484915(C) 申请公布日期 2010.04.13
申请号 CA20032484915 申请日期 2003.05.05
申请人 MESSIER-BUGATTI 发明人 SION, ERIC;BAUDRY, YVAN
分类号 C23C16/04;C23C16/452;C23C16/26 主分类号 C23C16/04
代理机构 代理人
主权项
地址