| 摘要 |
In the multilayered interconnect structure, an upper-layer interconnect is formed in an interlayer dielectric film formed on a lower-layer interconnect of copper, and the lower-layer interconnect and the upper-layer interconnect of copper are connected to each other through a via formed in the interlayer dielectric film. A layer of the interlayer dielectric film in contact with the lower-layer interconnect is made of a layer including, as a principal component, an aromatic compound containing a nitrogen atom having a lone pair of electrons in an aromatic ring.
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