发明名称 Method for manufacturing GaN semiconductor light-emitting element
摘要 A method for manufacturing a GaN semiconductor light-emitting element is provided. The method for manufacturing a GaN semiconductor light-emitting element includes forming, by crystal growth, a first GaN compound semiconductor layer of a first conductivity type, the top face of which corresponds to the A plane, an active layer composed of InxGa(1−x)N, the top face of which corresponds to the A plane, and a second GaN compound semiconductor layer of a second conductivity type, the top face of which corresponds to the A plane, in that order on a base which is a nonpolar plane, wherein the active layer is formed at a crystal growth rate of 0.3 nm/sec or more.
申请公布号 US7695991(B2) 申请公布日期 2010.04.13
申请号 US20060463233 申请日期 2006.08.08
申请人 SONY CORPORATION 发明人 OKUYAMA HIROYUKI;BIWA GOSHI
分类号 H01L21/00;H01L33/16;H01L33/32 主分类号 H01L21/00
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