METHOD AND APPARATUS FOR MEGASONIC CLEANING OF PATTERNED SUBSTRATES,申请号KR20057015366-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR MEGASONIC CLEANING OF PATTERNED SUBSTRATES
摘要
申请公布号	KR100952087(B1)	申请公布日期	2010.04.13
申请号	KR20057015366	申请日期	2004.02.04
申请人		发明人
分类号	B08B7/00;B08B3/12;C25F1/00;H01L21/00	主分类号	B08B7/00
代理机构		代理人
主权项
地址

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