发明名称 THERMAL SENSOR AND METHOD OF MAKING SAME
摘要 A two level microbridge infrared thermal detector having an upper detector planar section (a) comprising a temper-ature responsive detector of an oxide of vanadium having a high TCR and a resistivity in the range of 20K ohms to 50K ohms per square sheet resistance, and (b) being supporter above a lower section by leg portions of an oxide of vanadium having a resistivity of approximately 500 ohms per square sheet resistance.
申请公布号 CA2384937(C) 申请公布日期 2010.04.13
申请号 CA20002384937 申请日期 2000.09.13
申请人 HONEYWELL INC. 发明人 HIGASHI, ROBERT E.
分类号 G01J1/02;G01J5/22;G01J5/20;H01L27/144;H01L27/15;H01L31/18;H01L37/00 主分类号 G01J1/02
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