发明名称 CMOS DEVICE WITH P TYPE METAL GATE ELECTRODE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A CMOS device and a method for manufacturing the same are provided to prevent the polysilicon depletion effect of a PMOS transistor using a p-type metal layer as a gate electrode. CONSTITUTION: A gate insulation layer(24) is formed on a semiconductor substrate(21). A p-type metal layer(27) is formed on the gate insulation layer. The work function of the p-type metal layer is between 4.9 to 5.2 eV. The p-type metal layer includes one of Pt, Ru, Au, Ag, Mo, MoN or TiNi. The gate electrode of an NMOS transistor is an n-type polysilicon layer(25). The gate electrode of the PMOS transistor is the p-type metal layer.
申请公布号 KR20100037969(A) 申请公布日期 2010.04.12
申请号 KR20080097339 申请日期 2008.10.02
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SUNG, MIN GYU
分类号 H01L21/8238;H01L21/336 主分类号 H01L21/8238
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