| 摘要 |
PURPOSE: An RFID tag and a wafer cassette having the same are provided to prevent the contamination of a wafer and a processing device by having superior heat resistance, chemical resistance and durability. CONSTITUTION: A body(110) has a cylindrical shape, and includes a hole along the length direction therein. An RFID(Radio Frequency IDentification) module(120) is inserted into a hole of the body. A lid(130) is attached to and detached from the hole. The body and the lid is made of a PEEK(Polyether Ether Ketone) having superior heat resistance, chemical resistance and durability. The front end unit of the body facing the hole has a diameter smaller than the diameter of the body to be inserted into the other unit of the cassette. |
