| 摘要 |
PURPOSE: A device for manufacturing ultra pure water with a three-way valve is provided to prevent the contaminated ultra pure water around a restriction valve of a circulation line from flowing backward when the ultra fine water is extracted. CONSTITUTION: A device for manufacturing ultra pure water with a three-way valve comprises the following: a check valve(1) equipped on a raw water pipe; a pressure pump(2) pressurizing raw water supplied to the raw water pipe; an ultra pure filter(3) which is reverse osmosis filter or an ultra-pure water filter and removes impurities in the raw water; a 3-way valve(4) connected to an extraction outlet(6) and connected to a circulation line circulating the ultra pure water; a limit valve(5) formed on the bottom of the 3-way valve; and the extraction valve extracting the purified ultra pure water.
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