SEMICONDUTOR-SENSOR FOR MEASURING TILT OR ACCELERATION, AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A semiconductor-sensor for measuring tilt or acceleration, and a manufacturing method thereof are provided to easily miniaturize by simplifying the configuration of a heating element and a temperature sensor. CONSTITUTION: An insulating layer(101) is formed with an insulating material. A heating element(110) is formed on the insulating layer. The temperature sensor(120) is formed on the top surface of the insulating layer. The temperature sensor is separated from the heating element. A cover houses the insulating layer, the heating element, and the temperature sensor. The heating element heats the air. The temperature sensor senses the temperature of the peripheral area.