ELECTROSTATIC CHUCK HAVING MULTI-ELECTRODE PATTERN

摘要

PURPOSE: An electrostatic chuck including a multiple electrode pattern is provided to generate electrostatic force even though a part of electrode is damaged by multiplying an electrode pattern. CONSTITUTION: A first electrode layer(110) is patterned into a positive or a negative electrode. An insulation layer(130) is formed on the upper side of the first electrode. A second electrode(170) is formed on the insulation layer. A positive electrode and a negative electrode are alternately patterned. If the negative electrode is patterned on the first electrode layer, the positive electrode is patterned on the second electrode layer. If the positive electrode is pattern on the first electrode layer, the negative electrode is pattern on the second electrode layer.