发明名称 |
ELECTROSTATIC CHUCK HAVING MULTI-ELECTRODE PATTERN |
摘要 |
PURPOSE: An electrostatic chuck including a multiple electrode pattern is provided to generate electrostatic force even though a part of electrode is damaged by multiplying an electrode pattern. CONSTITUTION: A first electrode layer(110) is patterned into a positive or a negative electrode. An insulation layer(130) is formed on the upper side of the first electrode. A second electrode(170) is formed on the insulation layer. A positive electrode and a negative electrode are alternately patterned. If the negative electrode is patterned on the first electrode layer, the positive electrode is patterned on the second electrode layer. If the positive electrode is pattern on the first electrode layer, the negative electrode is pattern on the second electrode layer.
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申请公布号 |
KR20100038087(A) |
申请公布日期 |
2010.04.12 |
申请号 |
KR20100022194 |
申请日期 |
2010.03.12 |
申请人 |
ADP ENGINEERING CO., LTD. |
发明人 |
HA, SU CHUL;PARK, WOO JONG |
分类号 |
H01L21/687;B23Q3/15;H02N13/00 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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