MESH ELEMENT METHOD FOR MICRO-MACHINE

摘要

PURPOSE: A mesh element method for a micro-machine is provided to implement systematic configuration and efficiency between elements by showing an element division method for the finite element analysis of the MEMS and indicating the number of element as pointer. CONSTITUTION: An MEMS(Micro Electro Mechanical System) is split into elements(300) for finite element analysis. The split elements are split to small elements and analyzed. Numbers are assigned to the split elements based on a pointer method.