THE MANUFACTURING METHOD AND INDIUM TIN OXIDE(ITO) THIN FILMS DEPOSITED ON THE SODA LIME GLASS SUBSTRATE HAVING BARRIER LAYER

摘要

PURPOSE: A method for manufacturing a transparent conductive film of indium tin oxide is provided to reduce the grain boundary of a transparent conductive film and manufacture an ITO transparent conductive film, which has high surface roughness on a soda-lime glass board. CONSTITUTION: A method for manufacturing a transparent conductive film of indium tin oxide comprises following steps. A diffusion stopper is evaporated on the soda lime glass of the substrate. An indium tin oxide thin film is evaporated on the upper part of the protective layer. The thin film is heat-treated and crystallized.