DEVICE FOR CLAMPING WAFER OF VACUUM ROBOT,申请号KR20080018592-传众专利搜索

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发明名称	DEVICE FOR CLAMPING WAFER OF VACUUM ROBOT
摘要
申请公布号	KR100951932(B1)	申请公布日期	2010.04.09
申请号	KR20080018592	申请日期	2008.02.28
申请人		发明人
分类号	H01L21/68;H01L21/67	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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