| 摘要 |
PURPOSE: A method and a device for controlling a position of a probe card are provided to prevent malfunction by applying a separation position and a contact position to the probe card after the probe card is changed. CONSTITUTION: A substrate holder comprises a probe needle(1) which includes a needle tip(3) and is arranged in a probe card in order to be oriented in a right position. A setting device controls a substrate holder based on the probe card and includes a driving device with a memory which stores a contact position and a separation position. In a recording device, a recording axis line is oriented to a probe needle and is parallel to the substrate surface. A display device(2) provides a needle tip and the stored contact position, is connected to the memory of the driving device, and includes an input unit which changes the contact position. |
