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发明名称
THIN FILM FORMING APPARATUS FOR FILM SHAPE AND METHOD
摘要
申请公布号
KR100951621(B1)
申请公布日期
2010.04.09
申请号
KR20070136835
申请日期
2007.12.24
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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