UNIT FOR SUPPLYING SOURCE AND METHOD FOR SUPPLYING SOURCE AND APPARATUS FOR DEPOSITIONING THIN FILM

摘要

PURPOSE: A unit and a method for supplying raw materials and a device for depositing a thin film are provided to prevent a substrate from sagging by not restricting a deposition direction to a specific direction. CONSTITUTION: A high frequency coil unit(513) is formed on the outside of a crucible, vaporizes raw materials, and includes a coil shaped conductive tube and a cooling medium. An injector is connected to the crucible and injects the vaporized raw materials. A resistance heating unit(514) is formed outside the injector and vaporizes the raw materials. A cooling unit is formed outside the resistance heating unit and surrounds the injector.