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发明名称
PLASMA REACTOR FOR ELIMINATING WASTE GASES AND GAS SCRUBBER USING THE SAME
摘要
申请公布号
KR100951631(B1)
申请公布日期
2010.04.09
申请号
KR20080065326
申请日期
2008.07.07
申请人
发明人
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
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地址
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