| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a wiring pattern which, when a grid-like wiring pattern is formed, can prevent extraordinary expansion of intersection parts of the wiring pattern and moreover, can also bring a line width of a line part of the wiring pattern close to a design value, and thereby, can form the wiring pattern which is uniform as a whole and has a wiring width close to the intended design value, and to provide a method of manufacturing a printed circuit board. SOLUTION: The exposure pattern creation data 1 for producing a photo mask 14 is set so that the line width may taper down from a center position 3a between intersection parts 4 of an exposure pattern 2 in a line part 16 of the exposure pattern 2 toward the intersection parts 4 of the exposure pattern 2. The method of forming the wiring pattern includes a step of using a photo mask 14 which has the exposure pattern 2 formed based on the exposure pattern creation data 1 and exposing the light from a light source to a photosensitive resist layer 13 through the photo mask 14. COPYRIGHT: (C)2010,JPO&INPIT
|
