| 摘要 |
PROBLEM TO BE SOLVED: To establish a pattern forming technology using a reel-to-reel method and a liquid droplet discharge method, and to reduce cost of electronic equipment by mass production. SOLUTION: A system forms patterns on a belt-like substrate by the reel-to-reel method, including a liquid droplet discharge device 20 disposing a liquid material on the belt-like substrate 11 by the liquid droplet discharge method, and an atmospheric pressure control device 22 controlling the atmospheric pressure in a treatment space of the liquid droplet discharge device 20 higher than an adjacent space. The adjacent space may be constituted to include a space where heat treatment or optical treatment is performed to a membrane of the liquid material. COPYRIGHT: (C)2010,JPO&INPIT
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