APPARATUS AND METHOD FOR ELECTRON BEAM LITHOGRAPHY

摘要

<P>PROBLEM TO BE SOLVED: To improve precision of circumferential lithography by including a plurality of direct digital synthesizers using a reference clock synchronizing with the rotation of a maser in address information lithography of a magnetic disk apparatus by an electron beam mastering apparatus. Ž<P>SOLUTION: A direct digital synthesizer operating with a fixed frequency as a reference generates a spindle clock. A phase-locked loop circuit following the encoder signal of a spindle motor rotating on the basis of the spindle clock generates a rotation synchronization reference clock synchronizing with the irregular rotation of the spindle motor. A direct digital synthesizer with the rotation synchronization clock as the reference generates a write clock for the reference of a lithography pattern. Moreover, a counter counting the rotation synchronization clock or a divided signals of the same simultaneously switches the write clock and spindle clock to the next frequency every fixed count. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž