| 发明名称 |
MAGNETO-RESISTANCE BASED TOPOGRAPHY SENSING |
| 摘要 |
A topography sensor and method include a probe configured to traverse a surface to determine a topography. A stray magnetic field is disposed in proximity to the probe. A magneto-resistive sensor is configured so that the stray magnetic field passing through it changes in accordance with positional changes of the probe as the probe tip traverses the surface.
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| 申请公布号 |
US2010085056(A1) |
申请公布日期 |
2010.04.08 |
| 申请号 |
US20080245171 |
申请日期 |
2008.10.03 |
| 申请人 |
BAECHTOLD PETER;DUERIG URS T;HAEBERLE WALTER;KNOLL ARMIN W;POZIDIS CHARALAMPOS;SAHOO DEEPAK RANJAN;SALIS GIAN R;SEBASTIAN ABU |
发明人 |
BAECHTOLD PETER;DUERIG URS T.;HAEBERLE WALTER;KNOLL ARMIN W.;POZIDIS CHARALAMPOS;SAHOO DEEPAK RANJAN;SALIS GIAN R.;SEBASTIAN ABU |
| 分类号 |
G01V3/08;H01L43/08 |
主分类号 |
G01V3/08 |
| 代理机构 |
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