摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray detecting element which can reduce a wiring capacity of signal wiring while suppressing the deterioration of a fill factor. Ž<P>SOLUTION: A scintillator 30 for generating light corresponding to an irradiated X-ray, a semiconductor layer 6 for generating a charge according to the irradiation of light generated at a light emitting part, a lower electrode 11 for collecting the charges generated in the semiconductor layer 6 are arranged on a rear surface of a substrate 1. A TFT (thin film transistor) switch 4 is provided on a front surface of the substrate 1. The lower electrode 11 and the TFT switch 4 are connected through a conductor of a through hole 28. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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