| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for measuring the melt surface position (melt level) of a raw material melt in a Czochralski furnace. Ž<P>SOLUTION: The method is for measuring the position of a measurement part 7a wherein the reflected light reflected at the measurement part 7a is condensed by a condensing lens 13a and received by a two-dimensional light sensor 13b and the position of the measurement part 7a is measured by using the principle of triangulation based on the luminance of received reflected light. When the direction where the reflected light shows the position of the measurement part 7a in the two-dimensional light sensor 13b is called the first direction D1 and the direction which intersects perpendicularly with the first direction D1 is called the second direction D2, the method is equipped with the second direction centroid calculation procedure for calculating the second direction centroid which is the centroid of the second wave showing the luminance of reflected light along the second direction D2, the first direction center position calculation procedure for calculating the first direction center position which is the center of the first wave showing the luminance of reflected light along the first direction D1 based on the second direction centroid and the measurement part calculation procedure for calculating the position of the measurement part based on the first direction center position. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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