| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultraviolet curing system wherein an electrodeless lamp for ultraviolet curing can be efficiently cooled, while the life of the lamp is extended and stabilization can be achieved. Ž<P>SOLUTION: An ultraviolet irradiation unit 113 includes the electrodeless lamp 113a, a curved surface condensing mirror 113b for condensing light from the lamp and a microwave blocking mesh 113c provided in an opening of the mirror. Air for cooling is fed through an air feed duct 132 and an air feed pipe 131 into a lamp house 113d, in which the electrodeless lamp 113a and the curved surface condensing mirror 113b are arranged. The air fed into the lamp house 113d is blown against the electrodeless lamp 113a through a nozzle 113e to cool the same. The heated air after cooling the electrodeless lamp 113a flows along a workpiece W through the microwave blocking mesh 113c and discharged outside from an exhaust port H2 of an exhaust section through an exhaust duct 134. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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