发明名称 ELECTRON MICROSCOPE
摘要 <p>An electron microscope is provided with a phase plate (510) with a thickness that varies radially and adjusts the phase difference caused by the difference between electron beam paths due to the effect of spherical aberration when electron beams converge or form an image by a lens. Thus, coherence is improved by adjusting the phase difference caused by the difference between electron beam paths, so that a phase-contrast image of transmitted electrons can be obtained at a higher resolution.</p>
申请公布号 WO2010038534(A1) 申请公布日期 2010.04.08
申请号 WO2009JP62928 申请日期 2009.07.10
申请人 HITACHI HIGH-TECHNOLOGIES CORPORATION;NAGAOKI, ISAO;TANIGAKI, TOSHIAKI 发明人 NAGAOKI, ISAO;TANIGAKI, TOSHIAKI
分类号 H01J37/295;H01J37/26 主分类号 H01J37/295
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