发明名称 IMAGE SENSOR AND METHOD FOR MANUFACTURING THEREOF
摘要 PURPOSE: An image sensor and a manufacturing method thereof are provided to prevent a dark current by removing a dangling bond of a damaged silicon surface. CONSTITUTION: A readout circuit is formed on a first substrate. A wiring(150) is electrically connected to the readout circuit and is formed on an interlayer dielectric layer. An image sensor(210) is formed on a second substrate. The second substrate is bonded on the interlayer dielectric layer. The second substrate is removed except the image sensor. The exposed surface of the image sensor without the second substrate is etched by a first wet etching process.
申请公布号 KR20100036732(A) 申请公布日期 2010.04.08
申请号 KR20080096098 申请日期 2008.09.30
申请人 DONGBU HITEK CO., LTD. 发明人 HWANG, JOON
分类号 H01L27/146;H01L21/302 主分类号 H01L27/146
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