CONTAINER FOR HOUSING MASK BLANK, METHOD OF HOUSING MASK BLANK, AND MASK BLANK PACKAGE

摘要

PROBLEM TO BE SOLVED: To provide a container for a mask blank, that suppresses sticking of particles on the mask blank owing to dust generated during opening and closing of a container.

SOLUTION: The container includes a container body 5 whose top is made open and a cover body 6 with which the container body 5 is covered, the container body 5 and cover body 6 having fitting portions respectively to be fitted to each other to house the mask blank having a resist film inside. The container body 5 and cover body 6 are formed of resin materials and fixed with a fixing member 9 while being fitted to each other. The fixing member 9 includes a first member 91 and a second member 92 supported turnably on the first member 91, and the first member 91 and second member 92 are fitted to the fitting portions respectively to fix the fitting portions.

COPYRIGHT: (C)2010,JPO&INPIT