| 摘要 |
PROBLEM TO BE SOLVED: To provide an extraction electrode manipulator having reduced maintenance frequencies and reduced troubles. SOLUTION: The extraction electrode manipulator system includes a suppression electrode 210 supported by an inside support tube 248 of a support tube system coaxially arranged, a ground electrode 212 supported by an outside support tube 246 of the support tube system coaxially arranged, and a high voltage insulator ring 211 located at the distant end of the support tube system coaxially arranged to mechanically support the support tube system and serve as a high voltage vacuum feedthrough. As a result, the high voltage insulator ring 211 as an insulating stand-off is located at the distant end of the support tube system coaxially arranged near an ion source to mechanically support the inside support tube and serve as a high voltage vacuum feedthrough, thus reducing the possibility that vapor reaches the insulating surface of the insulator ring 211 to contaminate and cover it. COPYRIGHT: (C)2010,JPO&INPIT |
