发明名称 POLISHING SLURRY, PROCESS FOR PRODUCING SAME, METHOD OF POLISHING, AND PROCESS FOR PRODUCING GLASS SUBSTRATE FOR MAGNETIC DISK
摘要 A process for producing a polishing slurry which contains fine ceria crystal particles or fine ceria-zirconia solid-solution crystal particles and which, despite this, can be used to polish the main surface of a glass substrate at a high rate. The process for producing a polishing slurry having a pH of 2-7 is characterized by: producing a polishing slurry concentrate which comprises abrasive grains comprising ceria particles or ceria-zirconia solid-solution particles, a dispersant comprising 2-pyridinecarboxylic acid or glutamic acid, and water; dispersing the abrasive grains of the polishing slurry concentrate so that the diameter of the crystallites of the abrasive grains does not decrease by more than 10%; thereafter adding water; and further adding the same dispersant.
申请公布号 WO2010038617(A1) 申请公布日期 2010.04.08
申请号 WO2009JP66186 申请日期 2009.09.16
申请人 ASAHI GLASS COMPANY, LIMITED;SAKAI, TOMOHIRO;BEPPU, YOSHIHISA;TOMONAGA, HIROYUKI 发明人 SAKAI, TOMOHIRO;BEPPU, YOSHIHISA;TOMONAGA, HIROYUKI
分类号 B24B37/00;C03C19/00;C09K3/14;G11B5/84 主分类号 B24B37/00
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