| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for the flow rate measuring inspection of an inspection object accurately and reliably measuring the flow rate of the inspection object and used for the quality determination of the inspection object. Ž<P>SOLUTION: A buffer tank 13 disposed immediately under a bottom of a housing 4 provides communication between a delivery port 5a of a first pump 5 and a suction port 6a of a second pump 6. Piping 17 for measurement is connected to the buffer tank 13, and the piping 17 for measurement is connected a tank 19 opened to atmospheric air by a flow rate difference detection means 18. The flow rate difference detection means 18 is a measuring pipe 18 having a volume sufficient for temporarily storing a prescribed quantity of an inspection liquid provided from the buffer tank 13 through the piping 17 for measurement. The measuring pipe 18 is provided with first and second sensors 22a, 22b each detecting the liquid surface of the stored inspection liquid toward an inside space from a top. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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