Substratvorrichtung zum Herstellen einer Flüssigkristalldisplay-Tafel

摘要

A substrate bonding device for fabricating a liquid crystal display panel, comprises a lower chamber unit; chamber moving mechanism for raising and lowering an upper chamber unit; an upper stage for securing a first substrate; a lower stage for securing a second substrate; alignment cameras for verifying alignment state of alignment marks on substrates; and alignment mechanism. A substrate bonding device for fabricating a liquid crystal display (LCD) panel, comprises a base frame (100); a lower chamber unit (220) mounted to the base frame, defining a lower interior space with an upper surface; an upper chamber unit (210) arranged over the lower chamber unit, defining an upper interior space with a lower surface, and is joinable to the lower chamber unit; chamber moving mechanism for raising and lowering the upper chamber unit; an upper stage (230) arranged within the upper interior space for securing a first substrate; a lower stage (240) arranged within the lower interior space for securing a second substrate; alignment cameras (520) provided to the upper and/or lower chamber units for verifying an alignment state of alignment marks formed on the first and second substrates; and alignment mechanism arranged at side portions of the lower chamber unit for adjusting an alignment between the first and second substrates. An independent claim is included for a method of protecting stages of a substrate bonding device for fabricating a liquid crystal display (LCD) device, comprising providing a stage for securing a substrate of an LCD device; providing first and second reels on opposite sides of the stage; arranging a protection sheet over a surface of the stage that is scrollable over the surface of the stage; determining whether the protection sheet needs to be replaced; and based on the result whether the protection sheet needs to be replaced, rotating first and second reels such that the protection sheet over the surface of the stage is wound around one of the first and second reels and a new protection sheet is unwound from the other of the first and second reels and arranged over the surface of the stage.