METHOD AND DEVICE FOR MEASURING PHYSICAL PARAMETERS

摘要

The present invention relates to methods and devices to measure physical parameters, such as mechanical forces acting on flat, disk-like and fragile objects during the course of their usual processing. The methods and devices are particularly useful for the manufacturing of solar cells or solar wafers. The method according to the invention provides for the processing to be applied to a test body (1) having basically the same geometrical and/or mechanical properties as said objects, and comprising at least one sensor (2) for measuring physical parameters acting on the test body (1) during the course of its processing. Preferably, the sensor (2) is placed on an elastic interlayer (9) in order to amplify the measuring signal.