| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method and an apparatus used therefor capable of shortening the laser beam machining time of a plurality of holes. <P>SOLUTION: The laser beam machining apparatus comprises: a fly-eye lens 3 in which a plurality of unit lenses 12 are arrayed in a matrix shape at a predetermined pitch, and the intensity distribution of laser beam intermittently radiated from a laser beam source 10 is unified; and a micro lens array 4 which is provided opposite to a silicon substrate 6 to be conveyed, and has a plurality of lens rows formed by arranging a plurality of condenser lenses 13 at the predetermined pitch in the direction substantially orthogonal to the conveying direction of the silicon substrate 6, condenses the laser beam by each condenser lens 13 on the silicon substrate 6, and generates a plurality of beam spots arranged in a similar shape to the arrangement of each unit lens 12 of the fly-eye lens 3. Spaces between a plurality of holes to be formed by the lens row located on the head side of the conveying direction of the micro lens array 4 are supplemented by the subsequent lens row so as to execute the laser beam machining, and the subsequent lens row is deviated by the predetermined dimension in the direction substantially orthogonal to the conveying direction of the silicon substrate 6. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
