| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic type actuator increasing and decreasing a resonance frequency. Ž<P>SOLUTION: A user operates a triaxial manipulator to move a cutting bar up to a movable electrode 123 to be cut. When the chip of the cutting bar presses the connecting portion between an arm part 122 and an adjusting movable electrode 123a, the adjusting movable electrode 123a is broken at the connecting portion. The mass of the movable portion 120 is reduced thereby, increasing the resonance frequency of the movable portion 120. When the chip of the cutting bar presses the connecting portion between an adjusting beam 132 and an opening part 131, the adjusting beam 132 is broken at the connecting portion. The rigidity of a support portion 130 is reduced thereby, decreasing the resonance frequency of the movable portion 120. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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