| 摘要 |
PROBLEM TO BE SOLVED: To provide a tool capable of readily analyzing a number of defects detected, under a plurality of inspection conditions by an inspection apparatus. SOLUTION: The data processing apparatus includes a storage device for obtaining the coordinates of a plurality of defects, obtained by inspecting an object under a plurality of inspection conditions from an inspection apparatus and storing them, in relation to the inspection conditions; an arithmetic unit for coordinate matching, to detect the existence of common coordinates to at least two inspection conditions among the plurality of inspection conditions; and a display device for displaying the defects obtained under at least two inspection conditions with a plurality of defect coordinate maps, and selects proper inspection conditions. COPYRIGHT: (C)2010,JPO&INPIT
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